Series 024 | Large Transfer Valve Monovat

Large Transfer Valve Monovat

For FPD production systems up to generation 6. Suitable for use in high vacuum environment, e.g. in vapor deposition systems for organic materials.

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Factsheet

Series Number024
Series NameLarge Transfer Valve Monovat
DescriptionThe key features of the Monovat valve technology are the proven three-dimensional sealing technology, low particle performance, compact and modular design enables easy upscaling. By a wide range of options like protection shield for gate, cooling system for gate and body, bellows feed through, vertical installation direction etc. the catalogue product can be flexible adjusted to customer specific applications.
Actuator typesPneumatic actuator (double acting)
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughShaft feedthrough with intermediate pumping
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)special - special
Body materialAluminum
Cycles until first service 1 million cycles

Options

Valve
  • Special opening sizes: On request
  • Entire valve placed in vacuum chamber
  • Costumer specified flanges: Groove with O-ring
  • Surface: aluminum hard anodized
  • Watercooling in body to cool the flange seals
  • Vertical mounting position
Actuator
  • Solenoid for impulse actuation 24 V DC, 12 V DC, 115V 50/60 Hz, 230 V 50/60
  • Bellows feedthrough
Position indicator
  • NPN - tpye
Gate
  • Gate shield for heat radiation or coating from process protection
  • Watercooling at gate to cool the gate seal
  • Variety of gate sealing materials

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