Transfer valves and doors for FPD and PV


024 - Large transfer valve MONOVAT

The key features of the Monovat valve technology are the proven three-dimensional sealing technology, low particle performance, compact and modular design enables easy upscaling. By a wide range of options like protection shield for gate, cooling system for gate and body, bellows feed through, vertical installation direction etc. the catalogue product can be flexible adjusted to customer specific applications.


027 - Rectangular gate valve R2R MONOVAT

The Roll-to-Roll transfer valve MONOVAT enables tool owners to maintain vacuum isolation between the process and payout and take up chambers to allow for quick and easy exchange of sputter sources and foil/web coils. The MONOVAT Roll-to-Roll transfer valve with double seal MONOVAT technology allows the tool owner to maintain excellent leak rates in high vacuum applications while clamping metal or plastic web substrates without damage.


060 - Transfer valve XL-VAT

The key features of the XL-VAT technology are the fast and simple maintenance, low cost of ownership, adjustable sealing force on gate seal and modular design enables easy upscaling. By a wide range of options like gate grounding, various sealing compound materials for gate etc. (see table options) the product can be flexible adjusted to specific requirements.


061 - Rectangular gate valve TwinVAT

The key features of the TwinVAT technology are the lightweight design, fast opening and closing movement, low particle generation, easy and fast maintenance, low cost of ownership and the modular design enables easy upscaling. Unique with this valve design is the special service position while one chamber is maintained under vacuum during gate service. By a wide range of options like gate grounding, various sealing compound materials for gate etc. (see table options) the product can be flexible adjusted to specific requirements for.


066 - Transfer valve SolVAT

The key features of the SolVAT technology are the robust mechanism design which can withstand harsh environment, low cost of owner ship and modular design enables easy upscaling. By a wide range of options like water cooling on body and seat, full stainless steel valve etc. (see table options) the product can be flexible adjusted to specific requirements.


068 - Rectangular valve FlapVAT

The FlapVAT transfer valve is offered for opening heights up to 100mm as a low-cost supplement to the SolVAT transfer valve. The applied valve technology is referred to as a flapper. Compared to other flapper valves the FlapVAT transfer valve has a long gate seal lifetime and is mechanically locked in the closed position. Optionally, it is also available in the version «differential pressure resistant in either direction».


075 - Large door L-VAT

The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.


078 - Large door L-VAT

The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.


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