Series 053 | Rectangular insert L-MOTION

Rectangular insert L-MOTION

For load lock / process module isolation. For 300mm and 450mm semiconductor applications.

Switzerland Choose Country

Tel: + 41 81 771 61 61

Phone Support

Order Consulting

Contact Us
  • Albania
  • Algeria
  • American Samoa
  • Andorra
  • Angola
  • Anguilla
  • Antigua and Barbuda
  • Argentina
  • Armenia
  • Aruba
  • Australia
  • Austria
  • Azerbaijan
  • Bahamas
  • Bahrain
  • Baltic
  • Bangladesh
  • Barbados
  • Belarus
  • Belgium (Flanders)
  • Belgium (Wallonia)
  • Belize
  • Benin
  • Bermuda
  • Bhutan
  • Bolivia
  • Bosnia and Herzegovina
  • Brazil
  • British Indian Ocean Territory
  • Brunei Darussalam
  • Bulgaria
  • Burkina Faso
  • Burundi
  • Cambodia
  • Cameroon
  • Canada
  • Cape Verde
  • Cayman Islands
  • Central African Republic
  • Chad
  • Chile
  • China
  • Christmas Island
  • Cocos Keeling Islands
  • Colombia
  • Comoros
  • Congo
  • Congo, The Democratic Republic of The
  • Cook Islands
  • Costa Rica
  • Cote D'ivoire
  • Croatia
  • Cuba
  • Cyprus
  • Czech Republic
  • Denmark
  • Djibouti
  • Dominica
  • Dominican Republic
  • Easter Island
  • Ecuador
  • Egypt
  • El Salvador
  • Equatorial Guinea
  • Eritrea
  • Estonia
  • Ethiopia
  • Falkland Islands Malvinas
  • Faroe Islands
  • Fiji
  • Finland
  • France
  • French Guiana
  • French Polynesia
  • Gabon
  • Gambia
  • Georgia
  • Germany
  • Ghana
  • Gibraltar
  • Greece
  • Greenland
  • Grenada
  • Guadeloupe
  • Guam
  • Guatemala
  • Guinea
  • Guinea-bissau
  • Guyana
  • Haiti
  • Honduras
  • Hong Kong
  • Hungary
  • Iceland
  • India
  • Indonesia
  • Indonesia
  • Iran
  • Iraq
  • Ireland
  • Israel
  • Italy
  • Jamaica
  • Japan
  • Jordan
  • Kazakhstan
  • Kenya
  • Kiribati
  • Korea, North
  • Korea, South
  • Kosovo
  • Kuwait
  • Kyrgyzstan
  • Laos
  • Latvia
  • Lebanon
  • Lesotho
  • Liberia
  • Libyan Arab Jamahiriya
  • Liechtenstein
  • Lithuania
  • Luxembourg
  • Macau
  • Macedonia
  • Madagascar
  • Malawi
  • Malaysia
  • Maldives
  • Mali
  • Malta
  • Marshall Islands
  • Martinique
  • Mauritania
  • Mauritius
  • Mayotte
  • Mexico
  • Micronesia, Federated States of
  • Moldova, Republic of
  • Monaco
  • Mongolia
  • Montenegro
  • Montserrat
  • Morocco
  • Mozambique
  • Myanmar
  • Namibia
  • Nauru
  • Nepal
  • Netherlands
  • Netherlands Antilles
  • New Caledonia
  • New Zealand
  • Nicaragua
  • Niger
  • Nigeria
  • Niue
  • Norfolk Island
  • Northern Mariana Islands
  • Norway
  • Oman
  • Pakistan
  • Palau
  • Palestinian Territory
  • Panama
  • Papua New Guinea
  • Paraguay
  • Peru
  • Philippines
  • Philippines
  • Pitcairn
  • Poland
  • Portugal
  • Puerto Rico
  • Qatar
  • Reunion
  • Romania
  • Russia
  • Rwanda
  • Saint Helena
  • Saint Kitts and Nevis
  • Saint Lucia
  • Saint Pierre and Miquelon
  • Saint Vincent and The Grenadines
  • Samoa
  • San Marino
  • Sao Tome and Principe
  • Saudi Arabia
  • Senegal
  • Serbia
  • Seychelles
  • Sierra Leone
  • Singapore
  • Slovenia
  • Solomon Islands
  • Somalia
  • South Africa
  • South Georgia and The South Sandwich Islands
  • Spain
  • Sri Lanka
  • Sudan
  • Suriname
  • Svalbard and Jan Mayen
  • Swaziland
  • Sweden
  • Switzerland
  • Syria
  • Taiwan
  • Tajikistan
  • Tanzania, United Republic of
  • Thailand
  • Thailand
  • Timor-leste
  • Togo
  • Tokelau
  • Tonga
  • Trinidad and Tobago
  • Tunisia
  • Turkey
  • Turkmenistan
  • Turks and Caicos Islands
  • Tuvalu
  • Uganda
  • Ukraine
  • United Arab Emirates
  • United Kingdom
  • United States
  • Uruguay
  • Uzbekistan
  • Vanuatu
  • Vatican City
  • Venezuela
  • Vietnam
  • Virgin Islands, British
  • Virgin Islands, U.S.
  • Wallis and Futuna
  • Western Sahara
  • Yemen
  • Zambia
  • Zimbabwe

Series Symbolimage

product image

Click on the image to zoom



Factsheet

Series Number053
Series NameRectangular insert L-MOTION
DescriptionFor load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD.
Actuator typesPneumatic actuator (double acting)
Sealing technologyL-MOTION
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughBellows
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)50x336 (1.97"x13.23") - 50x336 (1.97"x13.23")
Body materialAluminum
Cycles until first service ≥ 3 million cycles

Options

Actuator
  • solenoid for impulse actuation 24 V DC, 12 V DC, 115V 50/60 Hz, 230 V 50/60 Hz
Valve
  • Different opening sizes: on request
  • Different sealing materials: - Fluoroelastomers (FKM)
  • Different sealing materials: - Perfluoroelastomers (FFKM)
  • Different sealing materials: - Silicone (VMQ)

Similar Products


Downloads

© 2018 VAT Group AG | Switzerland
Search