Series 032 | Transfer insert MONOVAT direct

Transfer  insert MONOVAT direct

For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers. - Low shock - Protected bellows - Long life time - locked pneumatically (option) - easy gate exchange

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Factsheet

Series Number032
Series NameTransfer insert MONOVAT direct
DescriptionFor load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers.
Actuator typesPneumatic actuator (double acting)
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughBellows
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)32x222 (1.26"x8.75") - 56x496 (2.20"x19.53")
Body materialAluminum; Stainless steel
Cycles until first service ≥ 5 million cycles

Options

Actuator
  • Pneumatically locked in closed and open position (check valve)
  • Other solenoid valve voltage (standard 24VDC)
  • Bakeable to 150 °C
  • Double position indicator for the positions OPEN and CLOSED
Insert
  • Surface: Hard anodised or nickel-plated aluminum
  • Surface: Aluminum, ball-polished stainless steel
  • Surface: Electro-polished stainless steel gate
  • FFKM gate seal (other sealing materials on request)
  • Protective shield for gate (protection against coating, plasma and process gases, heat radiation)
  • Seat: Tabs made of stainless steel with vulcanized ZALAK 5100 (B-side only)

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