Series 032 | Transfer insert MONOVAT direct

Transfer  insert MONOVAT direct

For load lock / process module isolation. For 200mm, 300mm and 450mm semiconductor applications.

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Factsheet

Series Number032
Series NameTransfer insert MONOVAT direct
DescriptionMONOVAT denotes a three-dimensional seal technology, which allows to close an open with a single motion. Despite the very short opening and closing times it is possible to reach lowest value for the particle and shock generation. The extremely compact and maintenance-free drive covers the entire area, which is required in the semiconductor industry for load lock and process chamber insulation (200mm to 450mm). The exchange of the gate is very simple and without loose parts. The insert version of the MONOVAT is installed directly from above into the chamber, without additional valve housing
Actuator typesPneumatic actuator (double acting)
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughBellows
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)32x222 (1.26"x8.75") - 56x496 (2.20"x19.53")
Body materialAluminum; Stainless steel
Cycles until first service ≥ 5 million cycles

Options

Actuator
  • Pneumatic locking in closed an open position
  • High speed venting valve for fast closing and opening times
  • Pressure control for the closed valve position
  • Bakeable to 150°C
  • Manual mechanical locking
  • Solenoid for impulse actuation 12 / 24 VDC, 115 / 230 V 50 / 60Hz
  • Bellows feedthrough with optimized particle protection
  • Bellows feedthrough with detachable convolutions and optimized particle protection
Valve
  • Types L, M, N: - L: Seat mounted to chamber wall, with bonnet flange, gate service through bonnet flange
  • Types L, M, N: - M: Seat mounted to chamber wall, without bonnet flange, gate service through chamber
  • Types L, M, N: - N: Seat mounted through chamber wall, without bonnet flange, gate service through chamber
  • Sealing materials (O-ring): - FKM, FFKM
  • Sealing materials (O-ring): - Other sealing materials on request
  • Surface treatments: - Aluminum: hard anodized or nickel-plated
  • Surface treatments: - Aluminum / stainless steel: ball-polished
  • Temperature management: - Valve body prepared for: liquid cooling (stainless steel) / nitrogen purge / heating cartridges
  • Temperature management: - Heating cartridges with or without thermocouple
  • Temperature management: - PTC heating cartridges
  • Temperature management: - Temperature sensors with/without overtemp. protection
Insert
  • Different opening sizes: - 25 x 160 / 210 / 265 / 420 (designation 01 / 02 / 03 / 04)
  • Different opening sizes: - 51 x 160 / 210 / 265 / 420 (designation 01 / 02 / 03 / 04)
  • Different opening sizes: - Other opening sizes on request, max. 56 x 700 mm; 100 x 500mm
Gate
  • Sealing materials for vulcanized seals: - FKM, FFKM
  • Sealing materials for vulcanized seals: - Other sealing materials on request
  • Gate with groove
  • Sealing material for gate O-ring: - FKM, FFKM
  • Sealing material for gate O-ring: - Other sealing materials on request
  • Surface treatment: - Aluminum: hard anodized or nickel-plated
  • Surface treatment: - Aluminum / stainless steel: ball-blasted or ball-polished
  • Surface treatment: - Stainless steel: electro polished
  • Protective shields against heat radiation / coating / plasma and process gases
  • Temperature management: - Liquid cooling (stainless steel)
  • Temperature management: - Gate with heating conductor
Position indicator
  • Bakeable to 150°C
  • Double position indicators in both end positions
  • Mechanical and electronic magnetic flied sensors with LED
  • Cycle counter

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