Series 021 | Transfer valve MONOVAT classic

Transfer valve MONOVAT classic

For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. - Mechanically locked in closed position - Low shock - Liquid cooling of body and gate (option) - UHV version (option) - Differential pressure tabs PEEK instead standard SUS (option)

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Factsheet

Series Number021
Series NameTransfer valve MONOVAT classic
DescriptionFor load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers.
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughBellows
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Body materialAluminium hard anodized; Aluminum; Stainless steel
Cycles until first service ≥ 2 million cycles

Options

Actuator
  • Pneumatically locked in open position
  • Other solenoid valve voltage (standard 24VDC)
  • Bakeable to 200 °C
  • Double position indicator for the positions OPEN and CLOSED
Valve
  • Surface: Hard anodised or nickel-plated aluminum
  • Surface: Aluminum, ball-polished stainless steel
  • Surface: Electro-polished stainless steel gate
  • Temperature management: Body prepared for liquid cooling (stainless steel)
  • Temperature management: Gate prepared for liquid cooling
  • Temperature management: Body prepared for heating cartridges
  • Temperature management: Resistance heating cartridges
  • FFKM gate seal (other sealing materials on request)
  • Protective shield for gate (protection against coating, plasma and process gases, heat radiation)
  • Body flange: Sealing surface or groove for O-ring seal
  • Body flange: FKM (Viton®) or FFKM body seal (O-ring)
  • Body flange: Metal body seal (stainless steel version)
  • Body flange: Screw holes outside or inside of the sealing line
  • Body flange: Centering pins, centering holes
  • Body: Tabs made of PEEK (B-side only)
  • UHV version: Body flange sealing surfaces for metal seal (VATSEAL)
  • UHV version: Metal seal on bonnet flange (VATSEAL)

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