MONOVAT denotes a three-dimensional seal technology, which allows to close an open with a single motion. Despite the very short opening and closing time it is possible to reach lowest value for the particle and shock generation. The extremely compact and maintenance-free drive covers the entire area, which is required in the semiconductor industry for load lock and process chamber insulation (200mm to 450mm). The exchange of the gate is very simple and without loose parts.
In addition, the transfer valve MONOVAT supplemented with various options, such as heat shield, enclosure cooling, surface treatment and choice of elastomer seals (FKM, FFKM)