Transfer valves and doors for semiconductors


021 - Transfer valve MONOVAT classic

For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers.


022 - Transfer valve MONOVAT direct

For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers.


031 - Transfer insert MONOVAT classic

For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers.


032 - Transfer insert MONOVAT direct

For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers.


043 - Transfer valve L-MOTION

For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD.


053 - Rectangular insert L-MOTION

For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD.


075 - Atmospheric door L-VAT

For load lock and process chamber isolation on the atmospheric side of semiconductor production systems.


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