Transfer valves and doors for SEMI


022 - Transfer valve MONOVAT direct

MONOVAT denotes a three-dimensional seal technology, which allows to close an open with a single motion. Despite the very short opening and closing time it is possible to reach lowest value for the particle and shock generation. The extremely compact and maintenance-free drive covers the entire area, which is required in the semiconductor industry for load lock and process chamber insulation (200mm to 450mm). The exchange of the gate is very simple and without loose parts. In addition, the transfer valve MONOVAT supplemented with various options, such as heat shield, enclosure cooling, surface treatment and choice of elastomer seals (FKM, FFKM)


032 - Transfer insert MONOVAT direct

MONOVAT denotes a three-dimensional seal technology, which allows to close an open with a single motion. Despite the very short opening and closing times it is possible to reach lowest value for the particle and shock generation. The extremely compact and maintenance-free drive covers the entire area, which is required in the semiconductor industry for load lock and process chamber insulation (200mm to 450mm). The exchange of the gate is very simple and without loose parts. The insert version of the MONOVAT is installed directly from above into the chamber, without additional valve housing


043 - Rectangular gate valve L-MOTION

L-MOTION is a mechanically actuated flow control, which ensures a controlled L- movement of the gate, a right-angled placement of the dynamic seal and a uniform compression of the elastomer. The pneumatic design allows a fast and low-vibration operation, the particle generation is very low and it has a lifetime of > 3 million cycles. L-MOTION is the youngest transfer valve family and was especially designed to operate in aggressive semiconductor processes (300mm & 450mm). There are various options available such as heated gates, surface treatments, various elastomers and gates with O-ring seal. The L-MOTION transfer valve is provided with a "service cover", which allows the change of the gate from the top of the valve body


053 - Rectangular insert L-MOTION

L-MOTION is a mechanically actuated flow control, which ensures a controlled L- movement of the gate, a right-angled placement of the dynamic seal and a uniform compression of the elastomer. The pneumatic design allows a fast and low-vibration operation, the particle generation is very low and it has a lifetime of > 3 million cycles. L-MOTION is the youngest transfer valve family and was especially designed to operate in aggressive semiconductor processes (300mm & 450mm). There are various options available such as heated gates, surface treatments, various elastomers and gates with O-ring seal. The Insert version of L-MOTION is installed directly from the bottom of the chamber without additional valve housing


075 - Atmospheric door L-VAT

The L-VAT atmospheric door is mainly used in the semiconductor industry as load lock door. For this drive no vacuum feedthroughs are required. A long service life (> 3 Mio), low-vibration operation and therefore low particle specify the L-VAT from door. The door covers the entire spectrum of the semiconductor industry (200mm to 450mm). Besides the vulcanized gate- seal optional O-ring gate solution are available.


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