Series 652 | Pendulum valve control system

Pendulum valve control system

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast. An advantage is the extended control range.

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Factsheet

Series Number652
Series NamePendulum valve control system
DescriptionSeries 652 Downstream pressure control and Isolation valve Compact design Very fast, virtually particle-free and shock-free operation High-performance, integrated controller
Actuator typesStepper motor
Sealing technologyRotary feedthrough (double seal)
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughRotary feedthrough
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)200 (8") - 250 (10")
Body materialAluminum
Cycles until first service 2.5 million throttling cycles, 20000 closing cycles

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