Series 651 | Pendulum valve control system

Pendulum valve control system

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast .

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Factsheet

Series Number651
Series NamePendulum valve control system
DescriptionPressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Actuator typesStepper motor, integrated controller
Sealing technologySEALRING-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughRotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)160 (6") - 400 (16")
Body materialAluminium hard anodized; Aluminium nickelled; Aluminum
Cycles until first service 1 million control cycles, 200'000 closing cycles
Pressure controlThe controller ensures fast and accurate pressure control. The unique LEARN feature automatically determines the characteristic of the vacuum system. LEARN needs to be performed only once during system setup. With its adaptive algorithm the controller contiuously adjusts to the current process conditions (gas type, gas flow). This assures allways an optimal pressure control performance.
Position controlPosition control mode allows to move the valve plate at any selected position.
DisplayA bright 4 digit display indicates status and valve position.
Remote operationVia a RS232-, Logic- or DeviceNet Interface the valve may be controlled from a host computer. The RS232 interface has digital inputs to close and open the valve in addtion. The Logic interface allows to control the valve via digital and analog inputs and outputs.
Service PortThe valve has a service port (RS232) to connect a computer. A software allows for easy setup, operation, monitoring, data recording, data analysis and diagnostics. 'Control View' as basic version is available as freeware. 'Control Performance Analyzer' is available on order. A service cable from VAT is required.
Power Failure Option (PFO)This function closes the valve automatically in case of a power failure.
Sensor Power Supply (SPS)Optionally the valve may be equipped with a ±15 VDC supply module for the sensor(s).
RS232 interface
Serial RS232-Interface
  • Control of all functions,
    selectable baud rate (600 - 115200)
Digital inputs
  • Close valve and open valve
Digital outputs
  • Valve closed and valve open
Analog outputs
  • Actual pressure and actual valve positon (optional)
Logic interface
Digital inputs
  • Close valve and open valve
  • Control mode
  • Learn, Zero and Hold
  • Inhibit operation via service port
Digital outputs
  • Valve closed and valve open
  • Remote control status
  • Setpoint deviation
Analog inputs
  • Pressure- or position setpoint
Analog outputs
  • Actual pressure and actual valve positon
DeviceNet® interfaceControl of all functions. DeviceNet® group 2 slave with Polling, Bit Strobe and Change of State/Cyclic Transmission. UCMM port (unconnected message manager) is available. 'Offline Connection Set' according to DeviceNet® specification relaease 2.0 is implemented.
Technical Data
Power input
  • 24 VDC, 60 W max.
Ambient temp.
  • 0 - 50°C
Control accuracy
  • 0.1% of sensor full scale
Step resolution
  • DN160 - DN250: 12'444 postions (full stroke)
  • DN320 - DN400: 13'440 postions (full stroke)
Sensor input
  • 0-10 VDC linear to pressure
  • differential, Ri > 100kOhm
Sensor supply
  • + 24 VDC, +/- 15VDC
Power Failure Option
  • Battery type: Ultracap
    Charging time: 2 min
  • Durability (25°C) up to 10 years
Input (Interface)
  • Digital: control with relay, opto coupler or
    voltage source (5-24 VDC)
  • Analog: 0 - 10 VDC, Ri > 100kOhm
Output (Interface)
  • Digital: potential free relay contacts,
    70V max., 500 mA max., 10 W max.
  • Analog: 0 - 10 VDC, 1 mA max.

Options

Actuator
  • Actuator B2
  • Controller with configurable PI parameters
  • RS232 interface with 2 analog outputs
  • Ethernet interface
Valve
  • Other sizes (e. g. DN 80)
  • Other flange types (e. g. ASA-LP)
  • Customer specified flanges (e. g. rectangular flange for direct mounting to chamber)
  • Other sealing materials
  • Other surface processings (e. g. nickel-plating)
  • KF ports on the body
  • Heater with insulation for valve temperatures 80°C, 100°C, 120°C
  • Controllers for operating several valves synchronously
  • Control valve only (no leaktight closing)
  • Wedge-shaped pendulum plate for smaller controllable conductances

Accessory

  • AC power supply (input: 100- 240 VAC, output: 24 VDC) - Part Nr.: 249775
  • Control Performance Analyzer Package (for service port) consisting of service cable and software - Part Nr.: 600SP-99NN-AAA1
  • Connecter kit for valves with RS232 or Logic interface - Part Nr.: 242411
  • Controller separation kit - Part Nr.: 255544
  • Control View Package (for service port) consisting of service cable and software - Part Nr.: 600SP-99NN-0001
  • Connecter kit for valves with DeviceNet (w/o DeviceNet connector) - Part Nr.: 242410

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