Series 650 | Pendulum valve control system

Pendulum valve control system

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast .

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Factsheet

Series Number650
Series NamePendulum valve control system
DescriptionPressure control and isolation valves with pendulum plate for downstream applications. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Actuator typesStepper motor, integrated controller
Sealing technologySEALRING-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughRotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)63 (2 1/2") - 400 (16")
Body materialAluminium hard anodized; Aluminium nickelled; Aluminum
Cycles until first service 1 million throttling cycles, 200'000 closing cycles (unheated and under claen conditions)
Pressure controlThe controller ensures fast and accurate pressure control. By operating the LEAEN function - needs to be done only once at start-up - the system parameters are automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures optimum pressure control. With its adaptive algorithm the controller contiuously adjusts to the current process conditions (gas type, gas flow). This assures always an optimal pressure control performance.
Position controlIn position control mode the valve plate can be moved to any position.
DisplayStatus and position are displayed by means of 4 bright digits.
Remote operationThe valve can be controlled by a host computer via RS232, Logic or DeviceNet® interface. The RS 232 interface also has digital inputs to close and open the valve. Control via Logic interface performs via digital and analog inputs and outputs. The RS232 interface has digital inputs to close and open the valve in addtion. The Logic interface allows to control the valve via digital and analog inputs and outputs.
Service PortThe valve has a service port (RS232) to connect a computer. A software allows for easy setup, operation, monitoring, data recording, data analysis and diagnostics. The valve has a service port (RS232) for connecting a computer. VAT can provide the following two versions of software: Basic version 'VAT Control View': Available as freeware (see www.vatvalve.com). Independent of the host computer, it enables setup, operation, monitoring and diagnosis. Extended version 'VAT Control Performance Analyzer' is available on order. This sophisticated tool offers a much wider range of possibilities than the basic version. For instance, it is possible to grahpically display the pressure behaviour or to program and record sequences. Also several possibilities for data analysis and process optimization are availablw. For connecting the valve both versions require a special cable from VAT.
Power Failure Option (PFO)This function closes the valve automatically in case of a power failure.
Sensor Power Supply (SPS)Optionally the valve may be equipped with a ±15 VDC supply module for the sensor(s).
RS232 interface
Serial RS232-Interface
  • Control of all functions,
    selectable baud rate (600 - 115200)
Digital inputs
  • Close valve and open valve
Digital outputs
  • Valve closed and valve open
Analog outputs
  • Actual pressure and actual valve positon (optional)
Logic interface
Digital inputs
  • Close valve and open valve
  • Control mode
  • Learn, Zero and Hold
  • Inhibit operation via service port
Digital outputs
  • Valve closed and valve open
  • Remote control status
  • Setpoint deviation
Analog inputs
  • Pressure- or position setpoint
Analog outputs
  • Actual pressure and actual valve positon
DeviceNet® interfaceControl of all functions. DeviceNet® group 2 slave with Polling, Bit Strobe and Change of State/Cyclic Transmission. UCMM port (unconnected message manager) is available. 'Offline Connection Set' according to DeviceNet® specification release 2.0 is implemented.
Technical Data
Power input
  • 24 VDC, 60 W max.
Ambient temp.
  • 0 - 50°C
Control accuracy
  • 0.1% of sensor full scale
Step resolution
  • DN160 - DN250: 12'444 postions (full stroke)
  • DN320 - DN400: 13'440 postions (full stroke)
Sensor input
  • 0-10 VDC linear to pressure
  • differential, Ri > 100kOhm
Sensor supply
  • + 24 VDC, +/- 15VDC
Power Failure Option
  • Battery type: Ultracap
    Charging time: 2 min
  • Durability (25°C) up to 10 years
Input (Interface)
  • Digital: control with relay, opto coupler or
    voltage source (5-24 VDC)
  • Analog: 0 - 10 VDC, Ri > 100kOhm
Output (Interface)
  • Digital: potential free relay contacts,
    70V max., 500 mA max., 10 W max.
  • Analog: 0 - 10 VDC, 1 mA max.

Options

Actuator
  • Actuator B2
  • Controller with configurable PI parameters
  • RS232 interface with 2 analog outputs
  • Ethernet interface
Valve
  • Other sizes (e. g. DN 80)
  • Other flange types (e. g. ASA-LP)
  • Customer specified flanges (e. g. rectangular flange for direct mounting to chamber)
  • Other sealing materials
  • Other surface processings (e. g. nickel-plating)
  • KF ports on the body
  • Heater with insulation for valve temperatures 80°C, 100°C, 120°C
  • Controllers for operating several valves synchronously
  • Control valve only (no leaktight closing)
  • Wedge-shaped pendulum plate for smaller controllable conductances

Accessory

  • Connecter kit for valves with DeviceNet (w/o DeviceNet connector) - Part Nr.: 242410
  • Controller separation kit - Part Nr.: 255544
  • Connecter kit for valves with RS232 or Logic interface - Part Nr.: 242411
  • Control View Package (for service port) consisting of service cable and software - Part Nr.: 600SP-99NN-0001
  • AC power supply (input: 100- 240 VAC, output: 24 VDC) - Part Nr.: 249775
  • Control Performance Analyzer Package - - Part Nr.: 600SP-99NN-AAA1

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