Series 642 | HV Control gate valves

HV Control gate valves

Control and isolation valve for SEMI, FPD and industrial processes. Optimal for sputtering and etching processes.

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Factsheet

Series Number642
Series NameHV Control gate valves
DescriptionHV Control gate valves with stepper motor for controlling and isolation.
Actuator typesStepper motor
Sealing technologyVATLOCK-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughRotary feedthrough
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)100 (4") - 400 (16")
Body materialStainless steel
Cycles until first service 200'000 cycles (DN400 horizontal mounting position only)

Options

Actuator
  • Acutator rotated by 90° / 180° to position 2 or 3 (position 1 is standard).
  • Actuator on B-side (A-side is standard)
  • Stepper motor for vertical mounting position DN 400 (closing timer 15 s, cycles until first service 50'000)
  • Solenoids for impulse actuation: actual valve position is maintained at power failure
  • Solenoid seperate, for external mounting
  • Solenoid for 12, 48 V DC
  • Solenoid for 24, 48, 100, 115, 200, 220 V / 50 Hz
  • Solenoid for 24, 100, 115, 200, 220 V / 60 Hz
Valve
  • Sizes DN 63 and 80 on request
  • Customer specified flanges
  • For direct mounting to flat chamber
  • Other sealing materials
  • Watercooled or water heated flanges
  • Rotary feedthrough with pump port
  • Ports for roughing (bypass), venting or for gauges

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