Series 615 | Butterfly with sealing function

Butterfly with sealing function

Semiconductors, FPD and industrial processes, particularly CVD systems.

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Factsheet

Series Number615
Series NameButterfly with sealing function
DescriptionDownstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
Sealing technologyRotary feedthrough (double seal)
Sealing GateFKM (VITON®)
Sealing Bonnetnone
FeedthroughRotary feedthrough (double seal)
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)40 (1 1/2") - 100 (4")
Body materialAluminium hard anodized; Stainless steel
Cycles until first service 2 million control cycles / 250000 (DN 40-50) or 100000 (DN 63-100) closing cycles
Pressure controlThe controller ensures fast and accurate pressure control. By operating the LEARN function needs to be done only once at start-up. The system parameters are automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures optimum pressure control at any time.
Position controlIn position control mode the valve plate can be moved to any position.
DisplayStatus and position are displayed by means of 4 bright digits.
Remote operationThe valve can be controlled by a host computer via RS232, RS422, RS485, Logic, DeviceNet®, Ethernet, Profibus, CC Link or EtherCAT interface. The RS232 interface and the field busses also have digital inputs to close and open the valve. In addition, digital outputs are available for «open» and «closed» (status of valve). Control via Logic interface performs via digital and analog inputs and outputs.
Service PortThe valve has a service port (RS232) for connecting a computer or a service box. VAT can provide two software versions which, independent of the hoster computer, allow a variety of functions. For connecting the computer to the valve, a special cable designed by VAT is required.
Power Failure Option (PFO)This function is optionally available. It closes or opens the valve automatically at power failure.
Sensor Power Supply (SPS)Optionally, the valve can be provided with a ±15 V DC power supply unit for the sensor/s.
RS232 interface
Serial RS232-Interface
  • Control of all functions,
    selectable baud rate (600 - 115200)
Digital inputs
  • Close valve and open valve
Digital outputs
  • Valve closed and valve open
Analog outputs
  • Actual pressure and actual valve positon (optional)
Logic interface
Digital inputs
  • Close valve and open valve
  • Control mode
  • Learn, Zero and Hold
  • Inhibit operation via service port
Digital outputs
  • Valve closed and valve open
  • Remote control status
  • Setpoint deviation
Analog inputs
  • Pressure- or position setpoint
Analog outputs
  • Actual pressure and actual valve positon
DeviceNet® interfaceControl of all functions. DeviceNet® group 2 slave with Polling, Bit Strobe and Change of State/Cyclic Transmission. UCMM port (unconnected message manager) is available. 'Offline Connection Set' according to DeviceNet® specification release 2.0 is implemented.
Technical Data
Power required
  • + 24 V DC (±10%) 38 W max. (controller + motor) 10 W max. for Power Failure Option 36 W max. for Sensor Power Supply
Sensor supply
  • 24 V DC or ±15 V DC
Sensor input voltage
  • - Signal voltage 0 - 10 V DC linear with pressure - Input resistance Ri = 100kΩ - Resolution 0.23 mV - Sampling rate 10 ms
Control accuracy
  • 0.1% of maximum sensor range
Step resolution
  • > 28 000
Ambient temp.
  • 50°C max. (<35°C recommended)
Power Failure Option
  • Battery type: Ultracap
    Charging time: 2 min
  • Durability (25°C) up to 10 years
Input (Interface)
  • Digital: control with relay, opto coupler or
    voltage source (5-24 VDC)
  • Analog: 0 - 10 VDC, Ri > 100kOhm
Output (Interface)
  • Digital: potential free relay contacts,
    70V max., 500 mA max., 10 W max.
  • Analog: 0 - 10 VDC, 1 mA max.

Options

Actuator
  • Ultra fast actuator (90 ms)
  • Controller with configurable PI parameters
  • RS232 interface with 2 analog outputs
  • Ethernet interface
  • DeviceNet interface
  • Logic interface
  • Profibus interface
  • RS-485 interface
  • CC-Link interface
  • EtherCAT interface
  • SPS = ± 15V DC Sensor Power Supply at power failure)
  • PFO = Power Failure Option (valve closes or opens automatically
Valve
  • Diameter Nominal: DN 40 / 50 with ISO-KF DN 63 / 80 / 100 with ISO-F
  • Other flanges (JIS, ASA-LP, CF-F)
  • Customer specified flanges
  • Aluminum hard anodized or nickel-plated
  • Other sealing materials
  • Heater with insulation for valve temperatures 80°C, 100°C, 120°C

Accessory

  • Series 615 - Butterfly with sealing function
  • Service cable - Part Nr.: 230327
  • Connector kit for valves with RS232, RS422, RS485 or Logic interface consisting of counter plugs for INTERFACE, SENSOR and POWER connections - Part Nr.: 242411
  • AC power supply unit (input: 100 - 240 V AC, output: 24 V DC / 4 A) - Part Nr.: 249775
  • Control panel for installation into 19" rack, including 5 m cable 5 m - Part Nr.: 602BS-29LE-0002
  • Connector kit for valves with fieldbus consisting of counter plugs for SENSOR and POWER connections - Part Nr.: 242410
  • CPA software including service cable 2 m - Part Nr.: 600SP-99LB-0001
  • Service box 2 (standard version with 1.5 m cable) - Part Nr.: 601BS-29NN-0003
  • CV software including service cable 2 m - Part Nr.: 600SV-99LB-0001

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