Series 612 | Butterfly valve control system

Butterfly valve control system

Field of application: Semiconductors, FPD / CVD systems and industrial processes.

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Factsheet

Series Number612
Series NameButterfly valve control system
DescriptionButterfly pressure control valves for downstream applications. Very fast and strong actuator. High-performance, integrated controller. Extremely short control response times and position indication. Automatic maintenance indication. Service port (conection for computer or service box 2 connection). Excellent resistance to contaminating processes.
Actuator typesStepper motor, integrated controller
Sealing technologyRotary feedthrough (double seal)
FeedthroughRotary feedthrough, (Viton)
Leak rate body < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)25 (1") - 250 (10")
Body materialAluminium hard anodized; Aluminum; Stainless steel
Cycles until first service 2 million cycles unheated and under clean conditions
Pressure controlThe controller ensures very fast and accurate pressure control. By operating the LEARN function — needs to be done only once at start-up — the system parameters are automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures optimum pressure control at any time.
Position controlIn position control mode the valve plate can be moved to any position.
Remote operationThe valve can be controlled by a host computer via RS232, RS422, RS485, Logic, DeviceNet®, Ethernet, Profibus, CC Link or EtherCAT interface.
The RS232 interface and the field busses also have digital inputs to close and open the valve. In addition, digital outputs are available for «open» and «closed» (status of valve).
Control via Logic interface performs via digital and analog inputs and outputs.
DisplayStatus and position are displayed by means of 4 bright digits.
Service PortThe valve has a service port (RS232) for «Local operation» to connecting a computer or a service box or a control panel. VAT can provide two software versions which, independent of the hoster computer, allow a variety of functions.
For connecting the computer to the valve, a special cable designed by VAT is required.
Power Failure Option (PFO)This function is optionally available. It closes (to the minimum conductance) or opens the valve automatically at power failure.
Sensor Power Supply (SPS)Optionally, the valve can be provided with a ±15 V DC power supply unit for the sensor/s.
Technical Data
Power required
  • + 24 V DC (±10%) @ 0.5 V pk-pk max.
    38 W max. (controller + motor)
    10 W max. for Power Failure Option
    36 W max. for Sensor Power Supply
Sensor supply
  • 24 V DC or ±15 V DC
Sensor input
  • Signal voltage 0 - 10 V DC linear with pressure
    Input resistance Ri = 100kΩ
    Resolution 0.23 mV
    Sampling rate 10 ms
Control accuracy
  • 5 mV or 0.1% of maximum sensor range, whichever is greater
Step resolution
  • 20 000 (steps = 0 - 90° rotation)
Ambient temp.
  • Controller 50°C max. (<35°C recommended)
    Valve body ≤ 150°C (Maximum values: depending on operating conditions and sealing materials)

Options

Actuator
  • Ultra fast actuator (0.1 s)
  • Controller with configurable PI parameters
  • Output for control of isolation valve
  • RS232 interface with 2 analog outputs
Valve
  • Sizes DN 320
  • Other flange types (JIS, ASA-LP, CF-F)
  • Customer specified flanges
  • Aluminum hard anodized or nickel-plated
  • Other sealing materials
  • Heater with insulation for valve temperatures 80°C, 100°C, 120°C
  • "Combo" body to combine a serie 612 valve with a series 121 isolation valve
  • "Combo" body to combine a serie 612 valve with a series 264 isolation valve

Accessory

  • Control View Package (for service port) consisting of service cable and software - Part Nr.: 600SP-99NN-0001
  • Connecter kit for valves with DeviceNet (w/o DeviceNet connector) - Part Nr.: 242410
  • Connecter kit for valves with RS232 or Logic interface - Part Nr.: 242411
  • Control Performance Analyzer Package (for service port) consisting of service cable and software - Part Nr.: 600SP-99NN-AAA1
  • AC power supply (input: 100- 240 VAC, output: 24 VDC) - Part Nr.: 249775
  • Service cable - Part Nr.: 230327

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