Series 168 | Large pendulum valve

Large pendulum valve

These valves are mainly used at FPD (Flat Panel Display) production systems for cryo pump isolation. A further field of application is the coating industry as glass coating, foil coating,...

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Factsheet

Series Number168
Series NameLarge pendulum valve
DescriptionThese large pendulum valves are for many applications. Besides the main field of application - FPD (Flat Panel Display) production systems - they are often used in the coating industry. Key features are compactness, low vibration during opening and closing, low price.
Actuator typesPneumatic actuator (double acting), 3-position pneumatic actuator
Sealing technologyVATLOCK-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughRotary feedthrough
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)400 (16") - 500 (20")
Body materialAluminum
Cycles until first service 100'000 cycles

Options

Actuator
  • Solenoid for 12, 24, 48 V DC
  • Solenoid for 24, 48, 100, 115, 200, 230 V 50/60 Hz
  • Actuator on A-side (valve seat side)
Valve
  • Customer specified flanges
  • Heater with insulation and overtemperature switch
  • Other sealing materials
  • Splinter shield grid for turbo pump
  • Window in plate
  • Ports in body
  • For direct mounting to chamber

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