Series 162 | New Version Pendulum valve

New Version Pendulum valve

For demanding semiconductor processes such as CVD and ETCH.

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Factsheet

Series Number162
Series NameNew Version Pendulum valve
DescriptionThe new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the same proved sealing principle and quality as the previous types, they are lower-priced. Further features are low particle count and quick and easy cleaning.
Actuator typesPneumatic actuator (single achting with closing spring NC)
Sealing technologySEALRING-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughRotary feedthrough
Leak rate body < 1 . 10-8 mbar ls-1
Leak rate Seat < 1 . 10-8 mbar ls-1
Nominal inside diameters (ID) in mm (inch)63 (2 1/2") - 400 (16")
Body materialAluminum
Cycles until first service 200'000 cycles

Options

Valve
  • Solenoid for 12, 24, 48 V DC
  • Solenoid for 24, 48, 100, 115, 200, 230 V 50/50 Hz
  • Solenoid separate for external mounting
  • Ports for roughing (by-pass), venting or gauges
  • Splinter shield
  • Other sealing materials
  • Customer specific flanges
  • Hard anodized aluminum or nickel-plated
  • Solenoid for impulse actuation (actual valve position is maintained at power failure)
Heating
  • Heater including insulation box and over temperature switch (80°C, 100°C, 120°C)
Actuator
  • Actuator side B2 (standard B1)
  • 3-position pneumatic actuator throttling
Gate
  • Gate with window

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