Series 152 | Low particle UHV Gate valve

Low particle UHV Gate valve

For applications where low particle count and low shock impact are a must. Mainly used in R&D.

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Factsheet

Series Number152
Series NameLow particle UHV Gate valve
DescriptionThese gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc
Actuator typesPneumatic actuator (double acting)
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetMetal
FeedthroughBellows, UHV
Leak rate body < 5 . 10-10 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)63 (2 1/2") - 200 (8")
Body materialStainless steel
Cycles until first service 500'000 cycles

Options

Actuator
  • Solenoid for impulse acting ( valve position remains in position in case of power failure)
  • Solenoid seperate for external mounting
  • Solenoid for 12, 48 V DC
  • Solenoid for 24, 48, 100, 115, 200, 220 V / 50 Hz
  • Solenoid for 24, 100, 115, 200, 220 V / 60 Hz
  • emergency operating solenoid lockable
Valve
  • Special flanges according to customers requirement.
  • several sealing materials possible ( Chemraz , EPDM etc.)
Plate
  • window in gate

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