Series 151 | Low particle HV gate valve

Low particle HV gate valve

For applications where low particle count and low shock impact are a must. Often used in R&D, but also in semiconductor process systems.

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Factsheet

Series Number151
Series NameLow particle HV gate valve
DescriptionThese gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc.
Actuator typesPneumatic actuator (double acting)
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughShaft feedthrough, Vakuum
Leak rate body < 1 . 10-9 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Body materialAluminum
Cycles until first service 500'000 cycles

Options

Actuator
  • Solenoid for impulse acting ( valve position remains in position in case of power failure)
  • Solenoid seperate for external mounting
  • Solenoid for 12, 48 V DC
  • Solenoid for 24, 48, 100, 115, 200, 230 V / 50 Hz
  • Solenoid for 24, 100, 115, 200, 230 V / 60 Hz
  • emergency operating solenoid lockable
Valve
  • body hardanodized
  • Special flanges according to customers requirement.
  • several sealing materials possible ( Chemraz , EPDM etc.)

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