Series 010 | Mini UHV gate valve

Mini UHV gate valve

The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.

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Factsheet

Series Number010
Series NameMini UHV gate valve
DescriptionMini-UHV-gate valve. General purpose valve for isolation in UHV or other demanding applications. Free of lubricants. Low particle generation. Low shock. Vulcanized gate seal.
Actuator typesManual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC)
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetMetal
FeedthroughBellow
Leak rate body < 5 . 10-10 mbar ls-1
Leak rate Seat < 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)16 (5/8") - 50 (2")
Body materialStainless steel
Cycles until first service 50'000 cycles

Options

Actuator
  • Solenoid for impulse actuation: actual valve position is maintained at power failure
  • Solenoid separate, for external mounting
  • Solenoid for 12, 48 V DC
  • Solenoid for 24, 48, 100, 115, 200, 230 V / 50 Hz
  • Solenoid for 24, 100, 115, 200, 230 V / 60 Hz
  • Manual emergency operation on solenoid lockable
  • Manual actuator with position indicator
  • Position indicator for 200°C with connecting cable 0.3 m contact rating: 1A / 48V AC, 1A / 72V DC
  • Pneumatic actuator, single acting with opening spring (NO)
  • Version for 1 mio cycles (special bellows)
Valve
  • Customer specified flanges
  • Insert version for integration into the vacuum system (without body)
  • Ohter sealing materials (Chemraz, EPDM etc.)
  • Window in gate: with seal made of VITON, exchangeable
  • Special valve gate, suitable to install various foils of orifices
  • Gate valve for gas analysis
  • With by-pass valves for gas analysis at high pressures
  • Gate valve with protective ring (see series 17)

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