A - Gate and Pendulum valves

are mostly used for turbo and cryo pump isolation. Besides the semiconductor industry, they are often used in FPD production systems, in the coating industry and R&D.

B - Control valves

in combination with a controller control the pressure in vacuum processes. The control valve is installed between the process chamber and the pump in order to control the pumping speed. This ensures fast and accurate process pressure control.

C - Transfer valves and doors for SEMI

are used for loadlock and process chamber isolation. The valves or inserts, are installed between chambers or are integrated. Doors are used for isolation on the atmospheric pressure side. The sizes are in accordance with the SEMI standards, but customer specifed dimensions are possible.

D - Transfer valves and doors for FPD and PV

are used for load lock, transfer and process chamber isolation. The products are tailored to each application which allows the addition of needed attributes to enhance customer system performance.

E - Angle or diaphragm valves

are shut-off devices for vacuum processes where an optically free passage is not required. The angle dimensions (mounting dimensions) are in conformity with the dimensions of commercial components (e. g. elbows, T-pieces, etc.) and ensure Exchangeability.

F - Special valves for accelerators and synchrotrons

are sector shut-off devices in storage rings in order to minimize the RF loss and to increase the beam life. Safety devices such as fast closing valves/shutters are used to prevent air inrush. Beam stoppers protect experiments from beam load.

G - Special valves for gases and heat insulation

are usually standard valves modified for special requirements.

H - Flange connections

are used to install vacuum components such as pumps, valves or sensors.

I - Multi-valve modules Heaters Coatings

VAT offers complete customer specific modules with integrated valves and pumping lines to optimize throughput and footprint of customer systems.

Heaters help to minimize depositions and reduce pump down time.

Coatings mitigate corrosion effects from aggressive processes.


X - ITER All-metal Valve Catalogue

VAT has been awarded the strategic agreement to supply all-metal valves to meet ITER specifications.

The catalogue contains the full range ITER approved all-metal valves.

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