VAT vacuum valves are used in advanced vacuum-based manufacturing processes to:

  • Isolate environments under two different pressures or physical conditions (i.e., isolation valves)
  • Control and regulate process gas flow and pressure (i.e., control valves)
  • Enable the transfer of substrates such as wafers, glass panels and other types of substrates and materials between atmosphere and vacuum environments (i.e., transfer valves).

Our product portfolio comprises approximately 140 valve series with more than 8,000 customized products and 2,500 standard products differing in size ranging from 10 mm to over 3 m, vacuum level, actuator and area of use (i.e., isolation, transfer and control), and have established themselves as the gold standard worldwide.

VAT has more than 1,000 products in its catalog.

© 2021 VAT Group AG | Switzerland